IEEE

Spatial Modeling with Automated Machine Learning and Gaussian Process Regression Techniques for Imputing Wafer Acceptance Test Data

Abstract: The Wafer Acceptance Test (WAT) is a significant quality control measurement in the semiconductor industry. However, because the WAT process can be time-consuming and expensive, sampling ...
IEEE

A Process-Aware Analytical Gate Resistance Model for Nanosheet Field-Effect Transistors

Abstract: In this paper, we propose a process-aware analytical gate resistance model for nanosheet field-effect transistors (NSFETs). The proposed NSFET gate resistance is modeled by applying the ...