Abstract: A novel structure was presented for a microelectromechanical system (MEMS) piezoresistive (PZR) accelerometer. Taking the advantage of the effects of the tiny piezoresistive beam (TPB) to ...
Abstract: In this article, the dynamic performance of microelectromechanical system (MEMS) resonant accelerometers when subjected to shock and vibration is meticulously analyzed and enhanced through ...
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