Texas Instruments Inc. (TI) has introduced the DLP991UUV digital micromirror device (DMD), its highest resolution direct imaging solution to date. Developed for digital lithography systems for ...

Miniaturized optical benches process free-space light propagating in-plane with respect to the substrate and have a large variety of applications, including the coupling of light through an optical ...

Micro‐electromechanical systems (MEMS) mirrors and micromirror technologies represent a dynamic confluence of microfabrication, precision engineering and advanced control systems. These devices ...

Imec researchers demonstrated the value of its SiGe above-IC MEMS technology platform for improving performance of state-of-the-art MEMS with the development of new MEMS devices. The new devices are a ...

Hankook Tire & Technology has been granted a patent for a micromirror design featuring a unique pivoting structure and comb drive system for precise actuation. The mirror, weight, and drive components ...

Fabrication of a flexible printed circuit board (FPCB) with an integrated micromirror. A) FPCB is attached to a glass substrate using SU-8 as temporary adhesive. B) 3D structures are 3D printed ...