A review of Ion Beam technology is presented in this paper. The key applications and benefits of using ion beam technology for etching processes in comparison to technology such as plasma etching will ...
2. Etching of Graphene Devices with a Helium Ion Beam We report on the etching of graphene devices with a helium ion beam, including in situ electrical measurement during lithography. The etching ...
Ion beam expertise is critical to delivering the manufacturing tolerance required for these gratings. Oxford Instruments Plasma Technology has developed a technology to allow optical designers to ...
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